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What are the factors/ considerations when attacking subs? I have been trying to attack subs with Naval Air, Carrier Based Air, Tactical Bombers as well as Destroyers. But there is a tendency for these subs to dive away.
What would increase the chances for inflicting damage?

Anti-submarine warfare tech upgrade

Subs have a 40% chance to dive + 10% chance per level of Advanced Subs tech. Anti-Submarine Warfare tech reduces this by 10% per level for non-subs. For example, a sub with Advanced Subs II upgrade vs a Cruiser with ASW I upgrade would have a 50% dive chance. Note that every time the sub dives (or engages in any combat at all) it loses one supply, and a sub at zero supply cannot dive anymore. More info on the raw mechanics of this can be found on page 118 of the manual, but some of those numbers have changed since release (ie, 20% -> 40%).

A dived sub doesn't exert Zone of Control and all ships except destroyers have a penalty to reveal them. Likewise, Destroyers are best for finding and destroying enemy submarines.

Chasing subs is likje playing whack-a-mole!